Tromp, R.M.; Copel, Matthew; Reuter, M.C.; Horn-von Hoegen, Michael; Speidell, J.:
A new two-dimensional particle detector for a toroidal electrostatic analyzer
In: Review of Scientific Instruments, Jg. 62 (1991), Heft 11, S. 2679
1991Artikel/Aufsatz in Zeitschrift
Physik (inkl. Astronomie)Fakultät für Physik » Experimentalphysik
Damit verbunden: 1 Publikation(en)
Titel:
A new two-dimensional particle detector for a toroidal electrostatic analyzer
Autor*in:
Tromp, R.M.;Copel, Matthew;Reuter, M.C.;Horn-von Hoegen, MichaelUDE
GND
1201039908
LSF ID
10366
ORCID
0000-0003-0324-3457ORCID iD
Sonstiges
der Hochschule zugeordnete*r Autor*in
;
Speidell, J.
Erscheinungsjahr:
1991

Abstract:

We describe a new two‐dimensional detector for the detection of ions scattered from a solid target, analyzed in energy and scattering angle by a toroidal electrostatic analyzer. The detector resolves the scattering angle with a resolution of 0.4° over a range of 25°, and the ion energy with a resolution of 120 eV over a range of 2000 eV, at 100 keV ion energy. The energy resolution of the spectrometer was improved with a factor 4 relative to its previous performance with a one‐dimensional scattering angle detector, while−at the same time−the dose efficiency (count/μC) was improved by a factor 5–10