Tromp, R.M.; Copel, Matthew; Reuter, M.C.; Horn-von Hoegen, Michael; Speidell, J.:
A new two-dimensional particle detector for a toroidal electrostatic analyzer
1991
In: Review of Scientific Instruments, Jg. 62 (1991), Heft 11, S. 2679
Artikel/Aufsatz in Zeitschrift / Fach: Physik
Fakultät für Physik » Experimentalphysik
Titel:
A new two-dimensional particle detector for a toroidal electrostatic analyzer
Autor(in):
Tromp, R.M.; Copel, Matthew; Reuter, M.C.; Horn-von Hoegen, Michael im Online-Personal- und -Vorlesungsverzeichnis LSF anzeigen; Speidell, J.
Erscheinungsjahr:
1991
Erschienen in:
Review of Scientific Instruments, Jg. 62 (1991), Heft 11, S. 2679
ISSN:
ISSN:
Link URL:

Abstract:

We describe a new two‐dimensional detector for the detection of ions scattered from a solid target, analyzed in energy and scattering angle by a toroidal electrostatic analyzer. The detector resolves the scattering angle with a resolution of 0.4° over a range of 25°, and the ion energy with a resolution of 120 eV over a range of 2000 eV, at 100 keV ion energy. The energy resolution of the spectrometer was improved with a factor 4 relative to its previous performance with a one‐dimensional scattering angle detector, while−at the same time−the dose efficiency (count/μC) was improved by a factor 5–10