Tromp, R.M.; Copel, Matthew; Reuter, M.C.; Horn-von Hoegen, Michael; Speidell, J.:

A new two-dimensional particle detector for a toroidal electrostatic analyzer

In: Review of Scientific Instruments, Jg. 62 (1991) ; Nr. 11, S. 2679
ISSN: 0034-6748, 1089-7623
Zeitschriftenaufsatz / Fach: Physik
Fakultät für Physik » Experimentalphysik
Abstract:
We describe a new two‐dimensional detector for the detection of ions scattered from a solid target, analyzed in energy and scattering angle by a toroidal electrostatic analyzer. The detector resolves the scattering angle with a resolution of 0.4° over a range of 25°, and the ion energy with a resolution of 120 eV over a range of 2000 eV, at 100 keV ion energy. The energy resolution of the spectrometer was improved with a factor 4 relative to its previous performance with a one‐dimensional scattering angle detector, while−at the same time−the dose efficiency (count/μC) was improved by a factor 5–10

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