Falta, J.; Bahr, D.; Materlik, G.; Müller, B.H.; Horn-von Hoegen, Michael:
X-ray characterization of buried delta layers
1998
In: Surface Review and Letters, Band 5 (1998), S. 145 - 149
Artikel/Aufsatz in Zeitschrift1998Physik
Fakultät für Physik » Experimentalphysik
Titel:
X-ray characterization of buried delta layers
Autor(in):
Falta, J.; Bahr, D.; Materlik, G.; Müller, B.H.; Horn-von Hoegen, MichaelLSF
Erscheinungsjahr
1998
DOI:

Abstract:

A combination of measurements of crystal truncation roda and X-ray standing waves has been used for a detailed characterization of buried Ge δ layers on Si(001). Measurements of crystal truncation rods reveal the interface roughness, the δ layer lattice constant and the δ layer concentration. From measurements with X-ray standing waves the dopant lattice position and crystallinity of the δ layer are determined. We find a linear dependence of the local tetragonal distortion of the Ge bonding in the δ layer on the Ge concentration in the layer.