Thien, Dagmar; Meyer zu Heringdorf, Frank; Kury, Peter; Horn-von Hoegen, Michael:
Characterizing Single Crystal Surfaces using High Resolution Electron Diffraction,
2004
In: Analytical and Bioanalytical Chemistry, Jg. 379 (2004), Heft 4, S. 588 - 593
Artikel/Aufsatz in Zeitschrift / Fach: Physik
Fakultät für Physik » Experimentalphysik
Titel:
Characterizing Single Crystal Surfaces using High Resolution Electron Diffraction,
Autor(in):
Thien, Dagmar im Online-Personal- und -Vorlesungsverzeichnis LSF anzeigen; Meyer zu Heringdorf, Frank im Online-Personal- und -Vorlesungsverzeichnis LSF anzeigen; Kury, Peter; Horn-von Hoegen, Michael im Online-Personal- und -Vorlesungsverzeichnis LSF anzeigen
Erscheinungsjahr:
2004
Erschienen in:
Analytical and Bioanalytical Chemistry, Jg. 379 (2004), Heft 4, S. 588 - 593
ISSN:
ISSN:
Link URL:

Abstract:

Characterization and controlled manipulation of surfaces is a crucial factor in modern processing of the technologically relevant Si(100) surface. Using spot profile analyzing low energy electron diffraction, the morphological changes from a single stepped vicinal Si(100) surface to a single-domain (2×1) reconstructed surface have been investigated in situ during Si deposition. The temperature range for formation of this kinetically-stabilized single-domain surface was found to be 400–500 °C. This single-domain surface could be preserved for further characterization and experiments after quenching to room temperature.