Thien, Dagmar; Meyer zu Heringdorf, Frank; Kury, Peter; Horn-von Hoegen, Michael:
Characterizing Single Crystal Surfaces using High Resolution Electron Diffraction,
In: Analytical and Bioanalytical Chemistry, Jg. 379 (2004), Heft 4, S. 588 - 593
2004Artikel/Aufsatz in Zeitschrift
Physik (inkl. Astronomie)Fakultät für Physik » Experimentalphysik
Damit verbunden: 1 Publikation(en)
Titel:
Characterizing Single Crystal Surfaces using High Resolution Electron Diffraction,
Autor*in:
Thien, DagmarUDE
LSF ID
10445
Sonstiges
der Hochschule zugeordnete*r Autor*in
;
Meyer zu Heringdorf, FrankUDE
LSF ID
48700
ORCID
0000-0002-5878-2012ORCID iD
Sonstiges
der Hochschule zugeordnete*r Autor*in
;
Kury, Peter;Horn-von Hoegen, MichaelUDE
GND
1201039908
LSF ID
10366
ORCID
0000-0003-0324-3457ORCID iD
Sonstiges
der Hochschule zugeordnete*r Autor*in
Erscheinungsjahr:
2004

Abstract:

Characterization and controlled manipulation of surfaces is a crucial factor in modern processing of the technologically relevant Si(100) surface. Using spot profile analyzing low energy electron diffraction, the morphological changes from a single stepped vicinal Si(100) surface to a single-domain (2×1) reconstructed surface have been investigated in situ during Si deposition. The temperature range for formation of this kinetically-stabilized single-domain surface was found to be 400–500 °C. This single-domain surface could be preserved for further characterization and experiments after quenching to room temperature.