Kury, Peter; Zahl, P.; Horn-von Hoegen, Michael:

Precise calibration for surface stress induced optical deflection measurements

In: Review of Scientific Instruments, Jg. 75 (2004) ; Nr. 6, S. 2211 (2p)
ISSN: 1089-7623, 0034-6748
Zeitschriftenaufsatz / Fach: Physik
Fakultät für Physik » Experimentalphysik
Bending sample methods, like surface stress induced optical deflection, are powerful tools for the in situ determination of thin film and surface stress: the bending radius of a sample is measured via the deflection of reflected laser beams. In most setups split-segment position sensitive detectors are used. A precise method for calibrating those detectors is presented