Kury, Peter; Zahl, P.; Horn-von Hoegen, Michael:
Precise calibration for surface stress induced optical deflection measurements
2004
In: Review of Scientific Instruments, Jg. 75 (2004), Heft 6, 2211 (2p)
Artikel/Aufsatz in Zeitschrift2004Physik
Fakultät für Physik » Experimentalphysik
Titel:
Precise calibration for surface stress induced optical deflection measurements
Autor(in):
Kury, Peter; Zahl, P.; Horn-von Hoegen, MichaelLSF
Erscheinungsjahr
2004
WWW URL
Erschienen in:
Titel:
Review of Scientific Instruments
in:
Jg. 75 (2004), Heft 6, 2211 (2p)
ISSN:
ISSN:

Abstract:

Bending sample methods, like surface stress induced optical deflection, are powerful tools for the in situ determination of thin film and surface stress: the bending radius of a sample is measured via the deflection of reflected laser beams. In most setups split-segment position sensitive detectors are used. A precise method for calibrating those detectors is presented