Kury, Peter; Hild, R.; Thien, Dagmar; Günter, H.-L.; Meyer zu Heringdorf, Frank; Horn-von Hoegen, Michael:
Compact and transferable threefold evaporator for molecular beam epitaxy in ultrahigh vacuum
2005
In: Review of Scientific Instruments, Jg. 76 (2005), Heft 8, 83906 (5p)
Artikel/Aufsatz in Zeitschrift / Fach: Physik
Fakultät für Physik » Experimentalphysik
Titel:
Compact and transferable threefold evaporator for molecular beam epitaxy in ultrahigh vacuum
Autor(in):
Kury, Peter; Hild, R.; Thien, Dagmar im Online-Personal- und -Vorlesungsverzeichnis LSF anzeigen; Günter, H.-L.; Meyer zu Heringdorf, Frank im Online-Personal- und -Vorlesungsverzeichnis LSF anzeigen; Horn-von Hoegen, Michael im Online-Personal- und -Vorlesungsverzeichnis LSF anzeigen
Erscheinungsjahr:
2005
Erschienen in:
Review of Scientific Instruments, Jg. 76 (2005), Heft 8, 83906 (5p)
ISSN:
ISSN:
Link URL:

Abstract:

A very compact molecular beam epitaxy (MBE) source is presented. It contains three Knudsen-type crucibles, two resistively and one electron bombardment heated. An efficient water cooling is implemented to allow MBE deposition under ultrahigh-vacuum conditions. Due to its small size, the evaporator fits inside a DN 36 CF T-piece which makes a separate bakeout possible. Refills of the crucibles as well as changes of the source materials and even repairs of the source can be carried out within a few hours without breaking the vacuum of the main chamber. The design and the usage of the MBE source are described in detail and its functionality is demonstrated exemplarily with data of silver deposition on the silicon (111) surface.