Stella, Kevin; Bürstel, Damian; Franzka, Steffen; Diesing, Detlef; Posth, Oliver:
Preparation and properties of thin amorphous tantalum films formed by small e-beam evaporators
2009
In: Journal of Physics, D, Applied Physics, Heft 42, S. 135417
Artikel/Aufsatz in Zeitschrift2009Chemie
Titel:
Preparation and properties of thin amorphous tantalum films formed by small e-beam evaporators
Autor(in):
Stella, KevinLSF; Bürstel, DamianLSF; Franzka, SteffenLSF; Diesing, DetlefLSF; Posth, OliverLSF
Erscheinungsjahr
2009