Plümel, Ingo; Hitzbleck, Klemens; Schulz, Christof; Wiggers, Hartmut:
Plasma Synthesis and Size-selected Deposition of Countable Silicon Nanoparticles
In: Materials Research Society Fall Meeting - Boston, 2008
Buchaufsatz/Kapitel in Sammelwerk2008Maschinenbau
Titel:
Plasma Synthesis and Size-selected Deposition of Countable Silicon Nanoparticles
Autor(in):
Plümel, IngoLSF; Hitzbleck, KlemensLSF; Schulz, ChristofLSF; Wiggers, HartmutLSF
Erscheinungsjahr
2008