Hitzbleck, Klemens; Wiggers, Hartmut; Roth, Paul:
Controlled formation and size-selected deposition of indium nanoparticles from a microwave flow reactor on semiconductor surfaces
2005
In: Applied Physics Letters, Jg. 87 (2005), Heft 9, 093105 (3pp)
Artikel/Aufsatz in Zeitschrift2005Maschinenbau
Titel:
Controlled formation and size-selected deposition of indium nanoparticles from a microwave flow reactor on semiconductor surfaces
Autor(in):
Hitzbleck, KlemensLSF; Wiggers, HartmutLSF; Roth, PaulLSF
Erscheinungsjahr
2005