Meijer, Jan; Pezzagna, Sébastien; Vogel, Thomas; Burchard, Bernard; Bukow, Hans-Heinrich; Rangelow, Ivo W.; Sarov, Yanko; Wiggers, Hartmut; Plümel, Ingo; Jelezko, Fedor; Wrachtrup, Jörg; Schmidt-Kaler, Ferdinand; Schnitzler, Wolfgang; Singer, Kilian:
Towards the the implanting of ions and nanoparticles with nm spatial resolution
2008
In: Applied Physics A, Jg. 91 (2008), Heft 4, S. 567 - 571
Artikel/Aufsatz in Zeitschrift2008Maschinenbau
Titel:
Towards the the implanting of ions and nanoparticles with nm spatial resolution
Autor(in):
Meijer, Jan; Pezzagna, Sébastien; Vogel, Thomas; Burchard, Bernard; Bukow, Hans-Heinrich; Rangelow, Ivo W.; Sarov, Yanko; Wiggers, HartmutLSF; Plümel, IngoLSF; Jelezko, Fedor; Wrachtrup, Jörg; Schmidt-Kaler, Ferdinand; Schnitzler, Wolfgang; Singer, Kilian
Erscheinungsjahr
2008