Hartmann, Claus; Weber, Rainer; Mertin, Wolfgang; Kubalek, Erich; Müller, Anne-Dorothea; Hietschold, Michael:

Simultaneous IC-internal voltage and current measurements via a multi lever Scanning Force Microscope

In: Microelectronics Reliability, Jg. Vol. 42 (2002) ; Nr. 9-11, S. 1759-1762
ISSN: 0026-2714
Zeitschriftenaufsatz / Fach: Elektrotechnik; Physik; Materialtechnik