Voltage-influence of biased interconnection line on integrated circuit-internal current contrast measurements via magnetic force microscopy

In: Microelectronics Reliability, Jg. Vol. 40 (2000) ; Nr. 8-10, S. 1389-1394
ISSN: 0026-2714
Zeitschriftenaufsatz / Fach: Elektrotechnik; Physik; Materialtechnik