Wittpahl, Volker; Ney, Christian; Behnke, Ulf; Mertin, Wolfgang; Kubalek, Erich:
Quantitative high frequency-electric force microscope testing of monolithic microwave integrated circuits at 20 GHz
1999
In: Microelectronics Relability, Jg. Vol. 39 (1999), Heft 6-7, S. 951 - 956
Artikel/Aufsatz in Zeitschrift1999ElektrotechnikPhysikMaterialtechnik
Titel:
Quantitative high frequency-electric force microscope testing of monolithic microwave integrated circuits at 20 GHz
Autor(in):
Wittpahl, VolkerLSF; Ney, Christian; Behnke, UlfLSF; Mertin, WolfgangLSF; Kubalek, ErichLSF
Erscheinungsjahr
1999