Wandelt, Klaus:
Tailor-made Precursors for the Deposition of Sb-containing Materials by MOCVD Process
2008
In: Journal of Crystal Growth, Band 310 (2008), S. 4715 - 4719
Artikel/Aufsatz in Zeitschrift / Fach: Chemie
Titel:
Tailor-made Precursors for the Deposition of Sb-containing Materials by MOCVD Process
Autor(in):
Wandelt, Klaus
Erscheinungsjahr
2008
Erschienen in:
Journal of Crystal Growth, Band 310 (2008), S. 4715 - 4719
WWW URL

Abstract:

Crystalline GaSb films were deposited using the tailor-made single-source precursor [t-Bu2GaSbEt2] in a specifically designed MOCVD reactor under HV conditions at low temperatures. In addition, tetraethyldistibine Sb2Et4 has been successfully used as the precursor for the deposition of crystalline antimony films at low temperatures.