Nellen, Philipp M.; Strasser, Patrick; Callegari, Victor; Wüest, Robert; Erni, Daniel; Robin, Franck:

Focused ion beam modifications of indium phosphide photonic crystals

In: Microelectronic engineering : an international journal of semiconductor manufacturing technology, Jg. 85 (2007) ; Nr. 5-8, S. 1244-1247
ISSN: 0167-9317
Zeitschriftenaufsatz / Fach: Elektrotechnik
Abstract:
This paper presents investigations in focused ion beam structuring and modification of indium phosphide/indium gallium arsenide phosphide based photonic crystal power splitters. The optical transmission and splitting ratio were compared to devices fabricated with electron beam lithography and inductively-coupled plasma, reactive ion etching. Prototyping of novel photonic designs, chip modifications, repair, and post-processing with focused ion beams may well reduce time to market in the telecommunication industry.

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