Nellen, Philipp M.; Strasser, Patrick; Callegari, Victor; Wüest, Robert; Erni, Daniel; Robin, Franck:
Focused ion beam modifications of indium phosphide photonic crystals
2007
In: Microelectronic engineering : an international journal of semiconductor manufacturing technology, Jg. 85 (2007), Heft 5-8, S. 1244 - 1247
Artikel/Aufsatz in Zeitschrift2007Elektrotechnik
Titel:
Focused ion beam modifications of indium phosphide photonic crystals
Autor(in):
Nellen, Philipp M.; Strasser, Patrick; Callegari, Victor; Wüest, Robert; Erni, DanielLSF; Robin, Franck
Erscheinungsjahr
2007
WWW URL

Abstract:

This paper presents investigations in focused ion beam structuring and modification of indium phosphide/indium gallium arsenide phosphide based photonic crystal power splitters. The optical transmission and splitting ratio were compared to devices fabricated with electron beam lithography and inductively-coupled plasma, reactive ion etching. Prototyping of novel photonic designs, chip modifications, repair, and post-processing with focused ion beams may well reduce time to market in the telecommunication industry.