Nanostructured silicon surfaces via nanoporous alumina.

In: Chemical Communications (Cambridge, United Kingdom), (2003) ; Nr. 12, S. 1333-1335
ISSN: 1359-7345
Zeitschriftenaufsatz / Fach: Chemie
Abstract:
Nanostructured silicon surfaces are generated using nanoporous alumina membranes as stamps to imprint PMMA films on silicon, followed by reactive ion etching.