ICP-OES was used for the element-specific detn. of water-sol. organosilicon species sepd. by HPLC. Leachates from different waste deposit sites were investigated. The polydimethylsiloxane (PDMS) degrdn. product dimethylsilanediol (DMSD) could be detected in almost all samples in the low mg L-1 range, and it was furthermore possible to det. trimethylsilanol (TMSOL) in some leachate samples in the mg L-1 range. TMSOL was addnl. analyzed by a method established before (LT-GC/ICP-OES). The occurrence of silanol compds. in leachates from locations were silicone material is deposited was proved.