For the characterization of segregations and non-metallic inclusions in steel samples, a scanning laser induced optical emission spectrometer (OES) was developed. This technique enables to carry out lateral element distribution analyses, which can be applied to mapping on heterogeneous grain structures likewise segregations in steel. Between the different species such as non-metallic inclusions and metallic matrix, it can be distinguished by their different element contents at each position. Coincidences of high intensity peaks at the same coordinates can be combined with specific inclusion types. Inclusion anal. and characterization of segregations in low alloy steel are reported.